Materials Science in Semiconductor Processing provides a unique and much needed forum for the discussion of experimental and theoretical materials research stimulated by and applied to semiconductor processing. Each issue will aim to provide a snapshot of current comprehension, new achievements, breakthroughs and future trends in such fields as ion implantation, diffusion and gettering, process and equipment modelling, metallization and interconnects, packaging, etc, which are the backbone of semiconductor device processing.
| YEAR | Impact Factor |
|---|---|
| 2023-24 | 4.2 |
| 2022 | 4.1 |
| 2021 | 4.644 |
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 1369-8001, 1998-ongoing, Engineering,Materials Science,Physics and Astronomy.